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Component Solution




Control Linker Platform과 XLINK 및 XLINKGEM을 사용하여 반도체 FAB의 자동화 사양인 GEM Application과 FPD FAB의 자동화 사양인 CIM을 구성한다.



SEMI Standard Compliance
-. SEMI E5(SECS-II)
-. SEMI E37.1(HSMS)
Features
-. ActiveX Control
-. Event Driven Programming Model
-. Development Language Independent





SEMI Standard Compliance
-. SEMI E5(SECS-II)
-. SEMI E37.1(HSMS)
-. SEMI E30(GEM)
-. SEMI E87(CMS)
-. SEMI E53(Event Report)
Features
-. SEMI E5, E37.1, E30 implemented.
-. ActiveX Control
-. Event Driven Programming Model
-. Custom SECS Message Support
-. Non-GEM Support
-. Development Language Independent
Function
-. Data Collection (SV/EC Data, Event Report, Trace data collection, etc)
-. Alarm Management
-. Variable Limit Monitoring
-. Spooling
-. Process Program
-. Remote Control
-. Etc…



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